In plain words

A measurement that separates the resistance of a device’s contacts from the resistance of the material itself, by comparing devices with channels of different lengths and working out what would be left at zero length – much as weighing a jar with different amounts of jam in it reveals the weight of the empty jar.

Going deeper

Three devices with the same contacts and different channel lengths, above a plot of total resistance against channel length: a straight line whose intercept is twice the contact resistance and whose backward extrapolation to zero resistance gives twice the transfer length. the same contacts, different lengths total resistance channel length 2R꜀ twice the transfer length two numbers out of one straight line what the line is telling you the slope is the sheet resistance divided by the width; the intercept at zero length is twice the contact resistance extrapolating the other way, to zero resistance, gives twice the transfer length: how far current spreads under a contact before it enters the channel on a 2D channel the contact resistance depends on the gate voltage, so a single number means nothing without the carrier density it was measured at and it assumes every device on the line is the same but for its length
Measuring one device gives the sum of the channel and its contacts. Measuring several of different lengths separates them: the slope gives the sheet resistance, and the intercept is twice the contact resistance.

Two unknowns, one straight line

Any two-terminal measurement returns the channel resistance and the added together, and no amount of care with a single device will separate them. The transfer length method makes a set of otherwise identical devices whose channels differ only in length. The channel contributes in proportion to that length; the contacts contribute a constant.

Plotting total resistance against channel length therefore gives a straight line whose slope is the divided by the device width, and whose intercept at zero length is twice the contact resistance – twice, because there are two of them. That intercept is the number quoted as a contact resistance, conventionally normalised by width and given in ohm-micrometres so that devices of different sizes can be compared.

What the transfer length is

Extrapolating the same line the other way, to zero resistance, gives a negative length whose magnitude is twice the transfer length. This is not an artefact: current does not enter the channel at the contact’s edge but spreads along it, and the transfer length is the distance over which most of that transfer happens.

It has a practical meaning. Making a contact much longer than the transfer length adds area without reducing resistance, because the far end of the contact carries almost no current. Knowing it tells a designer how much contact to make, and it sets the limit on how far contacts can be shrunk before contact resistance takes over – a limit that is becoming binding in scaled devices generally, and is already binding in 2D ones.

What makes it lie

The method assumes every device on the ladder is identical apart from its length. On a 2D channel that is a strong assumption: a patch, a bubble, a or a slightly different contact edge under one device shifts a point, and fitting a line through scattered points gives an intercept with an error bar much larger than the fit suggests. Plotting the individual points, not just the line, is the minimum.

The larger caveat is that contact resistance in these devices is not a constant. Because the contacts are usually -like and the is set by a gate, the contact resistance depends strongly on , and often on temperature. A single contact resistance number is therefore meaningless without the carrier density it was measured at, and a transfer-length analysis has to be done at fixed gate voltage, repeated across the range. Where possible, a four-probe measurement on the same channel gives an independent check on the sheet resistance, and a disagreement between the two is a sign that the assumptions have failed.

For specialists

Measuring resistance across channels of different lengths to separate contact resistance from channel resistance.

Where this comes from

  1. Models for contacts to planar devices Berger · Solid-State Electronics 15, 145 (1972) cited by 929